Tantalum airbridges for scalable superconducting quantum...
Author：Kunliang Bu, Sainan Huai, Zhenxing Zhang, Dengfeng Li, Yuan Li, Jingjing Hu, Xiaopei Yang, Maochun Dai, Tianqi Cai, Yi-Cong Zheng & Shengyu Zhang
Date：29 January,2025
Abstract：The unique property of tantalum, particularly its exceptional resistance to both acid and alkali, makes it promising for superconducting quantum processors. Here, we propose a novel lift-off method for fabricating tantalum airbridges with separate or fully-capped structures. This method introduces an aluminum film as a barrier layer to separate two layers of photoresist, which is then etched away beforedepositing tantalum film.
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