CBATCH 100s Batch Thermal ALD
Product Overview
CBATCH 100s is an atomic layer deposition (ALD) system designed for 4/6-inch LED production lines and oxide layer encapsulation coating on micro/nano-devices fabricated on patterned and planar sapphire substrates.
Technical Advantages
Increases throughput while reducing COO
Scalable modular design maintains coating quality when expanding capacity/chambers
Unique gas flow design achieves: WIW NU <1.5%, W2W <2.5%, B2B<2.5%
Exclusive exhaust treatment system extends vacuum pump maintenance cycles, reducing costs
